Integrated conventional and laser re-crystallised amorphous silicon thin film transistors for large area imaging and display applications

被引:7
作者
Hack, M. [1 ]
Mei, P. [1 ]
Lujan, R. [1 ]
Lewis, A.G. [1 ]
机构
[1] Xerox Palo Alto Research Cent, Palo Alto, United States
关键词
Thin film devices;
D O I
10.1016/0022-3093(93)91100-H
中图分类号
学科分类号
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页码:727 / 730
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