STRUCTURE OF CARBON FILMS FORMED BY THE PLASMA DECOMPOSITION OF HYDROCARBONS.

被引：24

作者：

Nadler, M.P. ^{[1
]}

Donovan, T.M. ^{[1
]}

Green, A.K. ^{[1
]}

机构：

[1] US Naval Weapons Cent, Michelson, Lab, China Lake, CA, USA, US Naval Weapons Cent, Michelson Lab, China Lake, CA, USA

来源：

Applications of surface science | 1983年 / 18卷 / 1-2期

关键词：

The authors thank Joseph Zelez of RCA Laboratories and Peter Koidl of the Fraunhofer Institute for supplying samples for this study. We also acknowledge the support of J.H. Dancy of the Naval Weapons Center in providing electron microscopy measurements. This work was supported by the Office of Naval Research and the Naval Weapons Center Independent Research funds;

D O I：

10.1016/0378-5963(84)90035-7

中图分类号：

学科分类号：

摘要：

引用

页码：10 / 17