Integration of microdiffractive lens with continuous relief with vertical-cavity surface-emitting lasers using focused ion beam direct milling

被引：28

作者：

Fu, Y. ^{[1
]}

机构：

[1] Prec. Eng. and Nanotechnology Ctr., Sch. of Mech. and Production Eng., Nanyang Technological University, Singapore 639798, Singapore

来源：

关键词：

Diffractive optical elements - Focused ion beam direct milling - Microdiffractive lens - Vertical cavity surface emitting lasers;

D O I：

10.1109/68.920738

中图分类号：

学科分类号：

摘要：

引用