SURFACE MODIFICATION OF ZrO2-Y2O3 ss BY ION IMPLANTATION.

被引:9
作者
Scholten, D. [1 ]
Burggraaf, A.J. [1 ]
机构
[1] Twente Univ of Technology, Lab of, Inorganic Chemistry & Materials, Science, Enschede, Neth, Twente Univ of Technology, Lab of Inorganic Chemistry & Materials Science, Enschede, Neth
关键词
IRON COMPOUNDS - YTTRIUM COMPOUNDS - ZIRCONIUM COMPOUNDS - Ion Implantation;
D O I
10.1016/0167-2738(85)90037-2
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学科分类号
摘要
With **5**6Fe** plus implantations in oxygen ion conducting solid solutions (ss) of 0. 86ZrO//2-0. 14YO//1//. //5 left bracket ZY14 right bracket electronic conductivity is introduced in a surface layer of less than 70 nm. The theoretically expected Gaussian distributions of Fe ions as calculated by computer simulation are compared with results of analyses by Auger electron spectroscopy and Rutherford backscattering spectroscopy. Mean projected ranges agree but remarkable differences in peak height and halfwidth are found. The implanted profile shapes remain stable under heat treatments up to 900 degree C. Higher temperatures cause a decrease in top concentration and broadening of the distribution. After annealing during 25 hrs. at 1500 degree C all implanted iron was dissolved in the ZY matrix and no precipitates were formed.
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页码:147 / 153
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