SYNCHROTRON RADIATION X-RAY LITHOGRAPHY BEAM LINE OF NOVEL DESIGN.

被引:15
作者
Cerrina, F. [1 ]
Guckel, H. [1 ]
Wiley, J.D. [1 ]
Taylor, J.W. [1 ]
机构
[1] Univ of Wisconsin-Madison, Dep of, Electrical & Computer, Engineering, Madison, WI, USA, Univ of Wisconsin-Madison, Dep of Electrical & Computer Engineering, Madison, WI, USA
来源
Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena | 1984年 / 3卷 / 01期
关键词
D O I
10.1116/1.583233
中图分类号
学科分类号
摘要
16
引用
收藏
页码:227 / 231
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