SURFACE DAMAGE AND TOPOGRAPHY CHANGES PRODUCED DURING SPUTTERING.

被引：41

作者：

Nelson, R.S. ^{[1
]}

Mazey, D.J. ^{[1
]}

机构：

[1] Metallurgy Division, A.E.R.E., Harwell,Berks, United Kingdom

来源：

| 1600年 / 18期

关键词：

D O I：

10.1080/00337577308234727

中图分类号：

学科分类号：

摘要：

Ion bombardment of solids creates radiation damage in the form of interstitials and vacancies while agglomerate into dislocation structures, so becoming visible in the electron microscope. Furthermore, ion bombardment causes sputtering of atoms from the surface of solids which can give rise to changes in surface topography. The paper briefly review, the salient features of these two phenomena and in particular points out their interrelation.

引用

页码：1 / 2