The effect of preparation on film structural and magnetic properties has been investigated. A high Bs value that approximately agreed with that of the bulk material was confirmed. For the evaporated film, in an fcc composition region that has a high Bs of 17approximately 18 kG in the fcc and a bcc phase border vicinity with a comparatively small Hc, good soft magnetic properties were obtained. It was determined that fabrication was possible in a wide composition range for the Fe-Co-Ni thin films even with the electrodeposition method. Information was obtained concerning the electrodeposition conditions and crystallinity of the electrodeposited film in regards to the composition adjustment. Good soft magnetic properties were obtained in the hard axis direction in a high-Bs (17approximately 18 kG) Fe44Co18Ni38 composition range, but a large positive magnetostriction (1.8 × 10-5) was present. Even in an anistropic electrodeposited film prepared in an extremely small area, a similarly high initial permeability (μi ≥ 103) was confirmed. This film can be used as a thin-film head material if a smaller magnetostriction can be achieved.