蓝宝石衬底的化学机械抛光技术的研究

白宝石单晶[M]. - 天津科学技术出版社 , 王崇鲁编著, 1983

Characteristics of InGaN multi-quantum-well-structure laser diodes .2 Nakamura S,Senoh M,Nagahama S et al. Applied Physics Letters . 1996

Chemical-mechanical Polishing for Fabricating Pattemed W Metal Features as Cgip Interconnects .2 Kaufman F B,Thompson D B,Broabie R E,et al. J. Electrochem. Soc . 1991

Chemical mechanical planarization of microelectronic materials .2 Steigermald J. M,Murarka S. P,Gutmann R. J. A Wiley-Inter-science Publication, John Wiley & sons, Inc . 1996

白宝石单晶[M]. - 天津科学技术出版社 , 王崇鲁编著, 1983

Characteristics of InGaN multi-quantum-well-structure laser diodes .2 Nakamura S,Senoh M,Nagahama S et al. Applied Physics Letters . 1996

Chemical-mechanical Polishing for Fabricating Pattemed W Metal Features as Cgip Interconnects .2 Kaufman F B,Thompson D B,Broabie R E,et al. J. Electrochem. Soc . 1991

Chemical mechanical planarization of microelectronic materials .2 Steigermald J. M,Murarka S. P,Gutmann R. J. A Wiley-Inter-science Publication, John Wiley & sons, Inc . 1996