等离子体辅助电子束物理气相沉积制备热防护涂层

被引:9
作者
彭徽
郭洪波
宫声凯
徐惠彬
机构
[1] 北京航空航天大学材料科学与工程学院
关键词
电子束物理气相沉积; 等离子体; 防护涂层; 抗氧化; 抗冲蚀; 热障涂层;
D O I
10.16080/j.issn1671-833x.2016.21.098
中图分类号
TG174.4 [金属表面防护技术];
学科分类号
摘要
电子束物理气相沉积(Electrom Beam-Physical Vapor Deposition,EB-PVD)是制备航空发动机热防护涂层的一种重要技术手段。采用等离子体辅助技术可进一步实现EB-PVD涂层的结构改性和性能提升。对等离子体辅助EB-PVD技术的研究现状进行了简要综述,并对等离子体辅助EB-PVD制备航空发动机MCr Al Y抗氧化涂层、氮化物抗冲蚀涂层及YSZ热障涂层研究进行了介绍。
引用
收藏
页码:98 / 104
页数:7
相关论文
共 21 条
[1]  
电子束物理气相沉积法制备SiC薄膜及性能研究.[D].潘训刚.合肥工业大学.2012, 06
[2]  
电子束蒸发倾斜沉积氧化铝薄膜结构与性质研究.[D].贺利军.电子科技大学.2014, 03
[3]  
The thermal cycling behavior of Lanthanum–Cerium Oxide thermal barrier coating prepared by EB–PVD.[J].Wen Ma;Shengkai Gong;Huibin Xu;Xueqiang Cao.Surface & Coatings Technology.2005, 16
[4]  
Tailored microstructure of EB-PVD 8YSZ thermal barrier coatings with low thermal conductivity and high thermal reflectivity for turbine applications.[J].Douglas E. Wolfe;Jogender Singh;Robert A. Miller;Jeff I. Eldridge;Dong-Ming Zhu.Surface & Coatings Technology.2004, 1
[5]  
A comparative study on tribological behavior of TiN and TiAlN coatings prepared by arc ion plating technique.[J].Seog-Young Yoon;Jong-Kuk Kim;Kwang Ho Kim.Surface & Coatings Technology.2002, 2
[6]  
Titanium nitride thin films obtained by a modified physical vapor deposition process.[J].P LeClair;G.P Berera;J.S Moodera.Thin Solid Films.2000, 1
[7]  
New coatings on metal sheets and strips produced using EB PVD technologies.[J].S. Schiller;Chr. Metzner;O. Zywitzki.Surface & Coatings Technology.2000, 1
[8]   Cyclic oxidation of sputter-deposited nanocrystalline Fe-Cr-Ni-Al alloy coatings [J].
Liu, Zhenyu ;
Gao, Wei ;
Li, Meishuan .
Oxidation of Metals, 1999, 51 (05) :403-419
[9]  
The hollow cathode: a high-performance tool for plasma-activated deposition.[J].H. Morgner;M. Neumann;S. Straach;M. Krug.Surface & Coatings Technology.1998,
[10]   Ni self-diffusion in alloyed Ni3Al [J].
Bokstein, BS ;
Bokstein, SZ ;
Spitsberg, IT .
INTERMETALLICS, 1996, 4 (07) :517-523