Silicate substrates were coated by ion sputtering with nickel,and then used to catalyze the decomposition of low hydrocarbons to prepare the relatively well distributed carbon nanotubes films(CNFs).The effects of sputtering time,etching,and treatment in ammonia water on the morphology of CNFs were investigated,respectively.SEM measurements showed that the morphology of CNFs became more orderly with the increase of sputtering time,and carbon nanotubes of CNFs would not arrange very tightly after the coated nickel films were etched or/and treated in ammonia water for some time.
