基于双频激光干涉技术的高精度直线度基准装置

被引:11
作者
赵辉
浦昭邦
刘国栋
机构
[1] 上海交通大学电子信息学院仪器系!上海
[2] 哈尔滨工业大学自动化测试及控制系!哈尔滨
关键词
直线度; 测量; 双频激光; 直尺; 反转;
D O I
暂无
中图分类号
TN247 [光检测技术];
学科分类号
摘要
提出一种高精度直线度基准装置 ,它以激光波长作为测量基准 ,采用双频激光干涉技术和直尺反转误差分离技术 ,在一般实验室条件下实现了优于 0 1μm/m的测量不确定度。目前该装置已应用于航天质量保证体系国防校准实验室
引用
收藏
页码:637 / 640
页数:4
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