超薄膜多中心生长过程的计算机模拟

被引：20

作者：

王晓平

赵特秀

吴锋民

林罡

吴自勤

机构：

[1] 中国科学技术大学物理系!合肥中国科学技术大学天文与应用物理系合肥

[2] 中国科学技术大学物理系!合肥

[3] 浙江工业大学技术物理研究所!杭州

[4] 中国科学技术大学天文与应用物理系!合肥

来源：

物理学报 | 1999年 / 08期

关键词：

超薄膜; 团簇; 生长过程; 分形生长; 计算机模拟; 计算机仿真;

D O I：

暂无

中图分类号：

O484.1 [薄膜的生长、结构和外延];

学科分类号：

摘要：

The multiple cluster growth with fractal or compact morphology in ultra\|thin films has been simulated with various permitted diffusion steps. It is shown that the fractal dimension increases with increasing cluster size in the fractal growth. The nucleation rate decreases with increasing diffusion steps and drops rapidly with increasing deposition time. The cluster size S can be described by a power law as S\|(t-t\-0)\+κ, where ( t-t\-0 ) is the growth time. The growth index κ is slightly smaller than 1 given by the classical nucleation and growth theory, due to the branching effect between clusters. A nonlinear phenomenon (i.e., the larger the cluster size, the larger the growth index κ ) has been obtained. PACC: 0540; 6890

引用

页码：1412 / 1419

页数：8