未找到相关数据
Position sensor based on slit imaging
被引：2
作者：
曾爱军
王向朝
步扬
李代林
机构：
关键词：
length;
Position sensor based on slit imaging;
than;
Figure;
D O I：
暂无
中图分类号：
TN24 [激光技术、微波激射技术];
学科分类号：
0803 ;
080401 ;
080901 ;
摘要：
<正> A position sensor based on slit imaging is proposed and its measurement principle is described. An imaging slit is illuminated by a collimated laser beam with square-wave modulation and imaged on a detection double slit through a 4f system. A magnified image of the detection double slit is formed on a bi-cell detector. The position of the imaging slit is obtained by detecting light intensity on two parts of the hi-cell detector. In experiments, the feasibility of the sensor was verified. The repeatability was less than 40 nm.
引用
收藏
页码：520 / 521
页数：2
相关论文