MoS2基复合薄膜制备及其结构与摩擦学性能研究

被引：21

作者：

柴利强 ^{[1
]}

张晓琴 ^{[2
]}

许佼 ^{[1
]}

乔丽 ^{[1
]}

张小龙 ^{[1
]}

王鹏 ^{[1
]}

机构：

[1] 中国科学院兰州化学物理研究所固体润滑国家重点试验室

[2] 兰州理工大学材料科学与工程学院

来源：

摩擦学学报 | 2016年 / 36卷 / 01期

关键词：

MoS2基复合薄膜; 结构; 力学性能; 摩擦学性能;

D O I：

10.16078/j.tribology.2016.01.001

中图分类号：

TB383.2 []; TH117 [机械摩擦、磨损与润滑];

学科分类号：

摘要：

利用多靶磁控溅射法制备MoS2基系列复合薄膜,通过扫描电子显微镜、X-ray衍射、拉曼光谱对薄膜微观形貌及晶体结构进行表征,利用纳米压入表征薄膜硬度及弹性模量,通过微动摩擦磨损试验对比分析了该系列薄膜在大气环境下的润滑性能.研究结果表明:MoS2薄膜中复合C、Ti元素可有效抑制薄膜生长过程中柱状结构的形成,薄膜更为致密;复合薄膜的摩擦系数及磨损率显著降低.其中,MoS2+C+Ti三元复合薄膜硬度为7.43 GPa,其弹性模量及弹性恢复量分别为98.1 GPa和61.7%.在大气环境（RH 35%50%）下,法向载荷10 N时MoS2+C+Ti薄膜具有最低的磨损率4.67×10–17 m3/（N·m）,该薄膜在不同载荷的微动摩擦试验中均具有最好的承载力.

引用

页码：1 / 6

页数：6

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