偏振态对飞秒激光加工石英玻璃表面质量的影响

被引:8
作者
吴东江
姚龙元
马广义
郭东明
机构
[1] 精密与特种加工教育部重点实验室(大连理工大学)
关键词
飞秒激光; 偏振态; 烧蚀形貌; 线重叠率; 表面粗糙度;
D O I
暂无
中图分类号
TN249 [激光的应用]; O437 [非线性光学(强光与物质的作用)];
学科分类号
摘要
为研究线偏振和圆偏振对飞秒激光烧蚀加工石英玻璃表面质量的影响,开展不同扫描速度的线烧蚀试验和不同线重叠率的面烧蚀试验。研究了线、圆偏振光对烧蚀线宽度的影响,利用光学显微镜和环境扫描电子显微镜观察烧蚀形貌,并使用三维表面轮廓仪进行烧蚀面粗糙度分析。结果表明:线偏振光烧蚀线宽度大于圆偏振光,且激光功率越大,线宽差异越明显;当线重叠率在65%90%时,线偏振光烧蚀表面粗糙度随重叠率增大而增大,在重叠率为65%时达到1.33μm;线轮廓算术平均偏差随重叠率增大先减小后增大,并在重叠率为80%时达到较小值1.05μm;当重叠率不到80%时,线偏振光烧蚀面线轮廓算术平均偏差比圆偏振光小;重叠率为90%时,其线轮廓算术平均偏差反而比圆偏振光大。
引用
收藏
页码:37 / 43
页数:7
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