金刚石膜生长过程原位光发射谱研究

被引：2

作者：

崔景彪

方容川

机构：

[1] 中国科技大学物理系!合肥，,中国科技大学结构分析开放实验室!合肥，

来源：

物理化学学报 | 1996年 / 02期

关键词：

光发射谱; 反应基团; 电子增强热打丝CVD;

D O I：

暂无

中图分类号：

O613.71 [碳C];

学科分类号：

摘要：

In situ opticaJ eAnssion spectra for an electron assisted hot filament diamond growth process were successfully measured with spatial resolution of better than 1 mm.The ethession lines from atoAnc hydrogen, molecular hydrogen, CH and CH+ radicals were observed in the visible region. Effects of the substrate bias on ethession spectra and diamond nucleation were also investigated. It is found that substratboan enhance the nucleation density, which may due to the changes of atoAnc hydrogen concentration and the increase of electron mean temperatuxe.

引用

页码：102 / 104

页数：3

共 8 条

[1]

Muranaka Y,Yamashita H,Sato K,et al. Journal of Applied Physics . 1990

[2]

Menuingen K L,Chils M A,Chevako P,et al. Chemical Physics Letters . 1993

[3]

Hsu W L. Applied Physics Letters . 1991

[4]

Diamond Re1at. Cubertafon J C,CheneYier M,Campargue A,et al. Mater . 1995

[5]

Zhang F Q,Zhang Y F,Yang Y H,et al. Applied Physics Letters . 1990

[6]

de la Cal E,Tabares F L. J. Applied Physics . 1993

[7]

Gomez-Aleixandre C,Sanchez O,Castro A,et al. Journal of Applied Physics . 1993

[8]

Kadono M,Inoue T,Miyanaga A,et al. Applied Physics Letters . 1990

← 1 →