溶胶-凝胶法制备耐磨宽带SiO2/TiO2增透膜

被引：18

作者：

贾巧英

乐月琴

唐永兴

姜中宏

机构：

[1] 中科院上海光学精密机械研究所高功率激光物理国家实验室,中科院上海光学精密机械研究所高功率激光物理国家实验室,中科院上海光学精密机械研究所高功率激光物理国家实验室,中科院上海光学精密机械研究所高功率激光物理国家实验室上海,上海,上海,上海

来源：

光学学报 | 2004年 / 01期

关键词：

薄膜物理学; 溶胶-凝胶; 宽带增透膜; 表面均匀; 耐擦除;

D O I：

暂无

中图分类号：

O484 [薄膜物理学];

学科分类号：

080501 ; 1406 ;

摘要：

以钛酸正丁酯 [Ti(OBu) 4 ]、正硅酸乙酯 (TEOS)为原料 ,采用溶胶凝胶 (sol gel)提拉方法在K9光学玻璃基片上镀制得高透过的λ/ 4～λ/ 2型宽带增透膜。该增透膜的表面均匀性良好 ,均方根粗糙度 (RMS)为 1.2 0 1,平均粗糙度 (RA)为 0 .934,具有一定的耐擦除性。经 2 0 0℃热处理 ,膜层中的OH吸收峰已基本消失 ,在 4 0 0～ 70 0nm光谱范围的透过率比基片的平均透过率提高 6 .6 %。为实现大面积涂覆“神光”装置主放大器的防爆隔板玻璃 ,大幅度提高主放大器的抽运效率奠定基础。

引用

页码：65 / 69

页数：5

共 11 条

[1]

Condensation and densification mechanism of sol-gel TiO2 layers at low temperature. Burgos M,Langlet M. Journal of Sol Gel Science and Technology . 1999

[2]

SolGelScience. BrinkerCJ,SchererGW. . 1990

[3]

Al2O3.H2O SiO2 sol gelHR coatingsforhigh powerlasers. FlochHG,PriottonJJ,ThomasIM. Proceedings of SPIE the International Society for Optical Engineering . 1990

[4]

High laser damage threshold porous silica antireflective coatings. Thomas I M. Applied Optics . 1986

[5]

Study of organic silicon resin protective coating with high Laser damage thresholds for KDP crystal. Tang Y X,Zhang W Q,Zhou W P et al. Chinese Journal of Lasers . 1994

[6]

Method for the preparation of porous silica antireflection coatings varying in refractive index from 1. 22 to 1. 44. Thomas I M. Applied Optics . 1992

[7]

A two layer broadband antireflective coatings prepared from a methyl silicon and porous silica. Thomas I M. Proceedings of SPIE the International Society for Optical Engineering . 1997

[8]

Ammonia-hardness of porous silica antireflective coatings. Belleville P F,Floch H G. Proceedings of SPIE the International Society for Optical Engineering . 1994

[9]

Preparation of a sol-gel broadband antireflective and scratch-resistant coating for amplifier blastshields of the French laser LIL. Prene P,Priotton J J,Beaurain L et al. Journal of Sol Gel Science and Technology . 2000

[10]

A sol-gel broadband antireflective and scratch-resistant coating for megajoule-class laser amplifier blastshields. Belleville P,Prene P. Proceedings of SPIE the International Society for Optical Engineering . 1998

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