[6]
Assessment of the adhesion quality of fusion-welded silicon wafers with nonlinear ultrasound[J] . A. Wegner,A. Koka,K. Janser,U. Netzelmann,S. Hirsekorn,W. Arnold.Ultrasonics . 2000 (1)
[6]
Assessment of the adhesion quality of fusion-welded silicon wafers with nonlinear ultrasound[J] . A. Wegner,A. Koka,K. Janser,U. Netzelmann,S. Hirsekorn,W. Arnold.Ultrasonics . 2000 (1)