基于商用坐标测量机的3D微纳米计量(英文)

被引：3

作者：

于连栋 ^{[1
]}

BRAND Uwe ^{[2
]}

机构：

[1] 合肥工业大学仪器科学与光电工程学院

[2] 德国联邦物理技术研究院

来源：

纳米技术与精密工程 | 2008年 / 06期

关键词：

微系统计量; 坐标测量机; 激光干涉仪; 光纤探针;

D O I：

10.13494/j.npe.2008.087

中图分类号：

TH721 [坐标器和自动坐标器];

学科分类号：

摘要：

以测量精度为1μm的商用坐标测量机(CMM)为基础,构建了测量范围为25mm×40mm×25mm、测量不确定度约为0.15μm的PTB微纳米专用坐标测量机.研究了CMM的运动控制系统、恒温室的空调系统以及CMM的被动隔振系统等对测量结果的影响.由测量结果可以看出,CMM的运动控制系统产生的噪声水平约为其他误差源的2倍.通过FFT运算,发现未优化系统的短时最大漂移量发生频率为750Hz,对应为运动控制的工作频率.文中还介绍了测量力为1μN光纤探针的测量原理,并给出了对2.5mm短轴的测量结果.

引用

页码：437 / 441

页数：5

共 12 条

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