共 14 条
[1]
Design and fabrication of silicon condenser microphone using corrugated diaphragm technique. Zou Quanbo et al. Journal of microelectromechanical systems, vol 5, No 3, September . 1996
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Fabrication of a silicon micromachined capacitive microphone using a dry-etch process. Ning Y B,et al. Sensors and Actuators . 1996
[3]
A new silicon condenser microphone with a p+ silicon membrane. Bourouina T,et al. Sensors and Actuators . 1992
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Capacitive microphone with low-stress polysilicon membrane and high-stress polysilicon backplate. Altti Torkkeli,et al. Sensors and Actuators . 2000
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The slot microphone, a new microphone excitation concept. Stoffel A,et al. Sensors and Actuators . 1999
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Improvement of the perfomance of microphones with a silicon nitride diaphragm and backplate. Scheeper P R,et al. Sensors and Actuators . 1994
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Optimization of capacitive microphone and pressure sensor performance by capacitor -electrode shaping. Voorthuyzen J A,et al. Sensors and Actuators . 1991
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A silicon condenser microphone with polyimide diaphragm and backplate. Michael Pedersen,et al. Sensors and Actuators . 1997
[9]
Capacitive microphone with a surface micromachined backplate using electroplating technology. Berqvist J,et al. Journal of Microbiology . 1994
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ZnO on Si integrated acoustic sensor. Royer M,et al. Sensors and Actuators . 1983