波长移相干涉仪的算法研究(英文)

被引:8
作者
于瀛洁
张本好
焦云芳
机构
[1] 上海大学精密机械系
[2] 上海大学精密机械系 上海
[3] 上海
关键词
相移干涉术; 波长调谐; 移相算法;
D O I
暂无
中图分类号
TH744.3 [];
学科分类号
0803 ;
摘要
叙述了波长移相干涉仪的基本原理,分析了其特点,对传统硬件移相干涉仪和波长移相干涉仪进行了比较,指出了它们的优缺点和应用范围。以美国NewFocus公司的可调谐半导体激光器为例,简述了实现波长调谐的硬件。文中将波长移相干涉仪算法分成三类:加权多步波长移相算法、基于傅里叶变换的波长移相算法和多波长算法,对这三类算法进行了较详细的叙述和分析,指出了各自的优缺点和应用范围。基于傅里叶变换的波长移相算法,提出了结合差分运算的适合于台阶测量的新算法,克服了已有算法中需要参考基准和参考面的缺点,提高了算法的实用性。
引用
收藏
页码:560 / 566
页数:7
相关论文
共 11 条
[1]  
Absolute distance measurements using FTPSI with a widely tunable IR laser. DECK L L. Proceedings of SPIE the International Society for Optical Engineering . 2002
[2]  
Fourier-transform speckle profilometry: three dimensional shape measurements of diffuse objects with large height steps and/or spatially isolated surfaces. TAKEDA M, YAMAOTO H. Applied Optics . 1994
[3]  
Derivation of algorithms for phase-shifting interferometry using the concept of a data-sampling window. de GROOT P. Applied Optics . 1995
[4]  
Methodandsystemforprofilingobjectshavingmultiplereflectivesurfaceusingwavelengthtuningphaseshiftinginterferometry. deGROOTP. US.2002,6359692 .
[5]  
Optical thickness measurement of substrates using a transmitted wavefront test at two wavelengths to average out multiple reflection errors. de GROOT P. Proceedings of SPIE the International Society for Optical Engineering . 2002
[6]  
300 mm-aperture phase-shifting Fizeau interferometry. FAIRMAN P S. Optical Engineering . 1999
[7]  
Phase-shifting via wavelength tuning in very large aperture interferometers. DECK L L, SOOBITSKY J A. Proceedings of SPIE the International Society for Optical Engineering . 1999
[8]  
Interferogramanalysis:digitalfringepatternmeasurementtechniques. DAVIDW,ROBINSONDW,REIDGT. . 1993
[9]  
Phase-shifting interferometer for distance measurement using a tunable external-cavity laser diode. ISHII Y, ONODER R. Proceedings of SPIE the International Society for Optical Engineering . 1999
[10]  
Improved algorithms for wavelength scanning interferometry: application to the simultaneous measurement of surface topography and optical thickness variation in a transparent parallel plate. Hibion K, Eoreb B, Fairman P S. Proceedings of SPIE the International Society for Optical Engineering . 2002