共 11 条
[1]
Absolute distance measurements using FTPSI with a widely tunable IR laser. DECK L L. Proceedings of SPIE the International Society for Optical Engineering . 2002
[2]
Fourier-transform speckle profilometry: three dimensional shape measurements of diffuse objects with large height steps and/or spatially isolated surfaces. TAKEDA M, YAMAOTO H. Applied Optics . 1994
[3]
Derivation of algorithms for phase-shifting interferometry using the concept of a data-sampling window. de GROOT P. Applied Optics . 1995
[4]
Methodandsystemforprofilingobjectshavingmultiplereflectivesurfaceusingwavelengthtuningphaseshiftinginterferometry. deGROOTP. US.2002,6359692 .
[5]
Optical thickness measurement of substrates using a transmitted wavefront test at two wavelengths to average out multiple reflection errors. de GROOT P. Proceedings of SPIE the International Society for Optical Engineering . 2002
[6]
300 mm-aperture phase-shifting Fizeau interferometry. FAIRMAN P S. Optical Engineering . 1999
[7]
Phase-shifting via wavelength tuning in very large aperture interferometers. DECK L L, SOOBITSKY J A. Proceedings of SPIE the International Society for Optical Engineering . 1999
[8]
Interferogramanalysis:digitalfringepatternmeasurementtechniques. DAVIDW,ROBINSONDW,REIDGT. . 1993
[9]
Phase-shifting interferometer for distance measurement using a tunable external-cavity laser diode. ISHII Y, ONODER R. Proceedings of SPIE the International Society for Optical Engineering . 1999
[10]
Improved algorithms for wavelength scanning interferometry: application to the simultaneous measurement of surface topography and optical thickness variation in a transparent parallel plate. Hibion K, Eoreb B, Fairman P S. Proceedings of SPIE the International Society for Optical Engineering . 2002