飞秒激光加工最新进展

被引:16
作者
孙晓慧
周常河
余昺鲲
机构
[1] 中科院上海光机所信息光学实验室
[2] 上海大学物理系 上海 上海大学物理系
[3] 上海
关键词
飞秒激光; 微加工; 烧蚀; 非线性吸收;
D O I
暂无
中图分类号
TG665 [光能加工设备及其加工];
学科分类号
080201 ;
摘要
综述了飞秒激光进行材料加工的多种机理和理论;主要介绍了飞秒激光对玻璃、石英、金属、聚合物等各种材料加工的最新研究进展状况及各方面的应用;飞秒激光加工是门新兴的学科,具有重要的应用前景。
引用
收藏
页码:37 / 45
页数:9
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