半导体激光微小振动实时反馈式干涉测量仪

被引:10
作者
宋松
王向朝
王学锋
钱锋
陈高庭
机构
[1] 中国科学院上海光学精密机械研究所信息光学研究实验室
关键词
实时测量; 反馈; 干涉仪; 半导体激光器;
D O I
暂无
中图分类号
TH744.3 [];
学科分类号
0803 ;
摘要
提出了一种带有反馈系统的半导体激光正弦相位调制干涉仪。该干涉仪可以实现对微小振动的高精度实时测量。通过一个简单的信号处理系统对干涉信号进行分析 ,获得实际振动的振幅和频率。由于引入反馈系统 ,减低了测量误差 ,排除了环境噪声的影响。给出了具体的理论分析和实验结果
引用
收藏
页码:402 / 406
页数:5
相关论文
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