磁控溅射制备的氧化钒薄膜的结构研究

被引:11
作者
王玫
李喜梅
崔敬忠
达道安
姜万顺
邱家稳
机构
[1] 兰州大学物理学系
[2] 兰州物理研究所
关键词
氧化钒;薄膜;结构;
D O I
10.13885/j.issn.0455-2059.1999.01.012
中图分类号
O484.5 [薄膜测量与分析];
学科分类号
摘要
用X射线光电子谱(XPS),原子力显微镜(AFM)和X射线衍射(XRD)研究了磁控溅射制备的氧化钒薄膜的宏观、微观和电子学结构.建立了薄膜的相结构与XPS谱中V2p3/2特征峰的结合能之间的定量关系.给出了二氧化钒薄膜的AFM像.所得到的二氧化钒热致变色薄膜的结构特性与光电特性相一致.
引用
收藏
页码:66 / 70
页数:5
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