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Chemical vapor deposition of aluminum and gallium nitride thin films from metalorganic precursors. D. M. Hoffman,S. P. Rangarajan,S. D. Athavale et al. Journal of Vacuum Science and Technology . 1996
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Effect of bias voltage on AlN thin films prepared by electron shower method. M. Ishihara,H. Yumoto,T. Tsuchiya et al. Thin Solid films . 1996
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Reaction of N2+ beams with aluminum surfaces. J. A. Taylor,J. W. Rabalais. The Journal of Chemical Physics . 1981
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Pulsed Laser deposition of Thin Films. B. D. Chrisey,G. K. Bubler. . 1994
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Preparation of AlN thin films by nitridation of Al-coated Si substrate. J. Huang,L. Wang,Q. Shen et al. Thin Solid films . 1999
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Alumina, aluminium nitride and aluminium composite coating on 0. 45% C steel by using plasma source ion implantation and deposition(PSII&D) system. B. Liu,B. Y. Jiang,Y. Fu et al. Thin Solid films . 1999