PMMA材料制作X射线组合透镜技术研究

被引：8

作者：

梁静秋 ^{[1
]}

乐孜纯 ^{[2
]}

机构：

[1] 中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室

[2] 浙江工业大学信息工程学院

来源：

光学精密工程 | 2005年 / S1期

关键词：

X射线组合透镜; 三维聚焦性能; PMMA透镜; 软X射线光刻;

D O I：

暂无

中图分类号：

TH74 [光学仪器];

学科分类号：

0803 ;

摘要：

给出了基于衍射理论的评价X射线聚焦组合透镜三维聚焦性能的理论方法。利用该理论方法分析得出X射线组合透镜的聚焦性能与透镜的工作波长、透镜材料、单元透镜数量及凹面半径等参数之间的关系。用LIGA技术中的软X射线光刻方法制作了PMMA材料X射线组合透镜。该组合透镜由40个平凹折射单元依次排列而成,相邻的两透镜单元彼此相切,凹面半径分别为200μm,400μm,500μm,600μm,700μm。此外,X射线组合透镜的表面粗糙度测试结果表明,粗糙度均方根值小于50 nm。

引用

页码：60 / 64

页数：5

共 16 条

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