红外焦平面成像器件发展现状

被引:54
作者
陈伯良
机构
[1] 中国科学院上海技术物理研究所上海
关键词
红外焦平面列阵; 碲镉汞; 锑化铟; 量子阱红外探测器;
D O I
暂无
中图分类号
TN215 [红外探测、红外探测器];
学科分类号
0803 ; 080401 ; 080901 ;
摘要
红外焦平面列阵成像技术已经进入了成熟期。本文对几种红外焦平面列阵器件如MCT、InSb和QWIP的最新进展作一评述,简要介绍其器件发展水平、技术路线和关键工艺。简要提及一种新颖的非制冷焦平面成像技术:光学读出微光机红外接收器。
引用
收藏
页码:1 / 7
页数:7
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