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A Wide Frequency Range, Rugged Silicon Micro Accelerometer with Over range Stops. J. Suminto. IN: 9 th IEEE Int.Workshop on Micro Electro Mechanical Systems . San Diego,CA, Feb. 1 1-1 5 . 1 9 9 6
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An integrated force balanced capacitive accelerometer for low-g applications. Chau K,Lewis SR,Zhao Y,Howe RT,Bart SF,and Marcheselli RG. Sensors and Actuators . 1 9 9 6
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Characterization and modelling of silicon piezoresistive accelerometers fabricated by a bipolar-compatible process. Tschan T,de Rooi j N,Bezinge A,Ansermet S,Berthoud J. Sensors and Actuators . 1 9 9 1
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Micromachined Inertial Sensors. Yazdi N,Ayazi F,and Najafi K. Proceedings of the IEEE . 1 9 9 8