一种激光外差干涉非线性误差新颖测量方法

被引：9

作者：

钟志

谭久彬

陈洪芳

单明广

机构：

[1] 哈尔滨工业大学超精密光电仪器工程研究所

[2] 哈尔滨工业大学超精密光电仪器工程研究所黑龙江哈尔滨

来源：

光电子·激光 | 2005年 / 07期

关键词：

激光外差干涉; 非线性误差; 频谱分析; 幅度模型; 一次谐波; 二次谐波;

D O I：

10.16136/j.joel.2005.07.014

中图分类号：

TN247 [光检测技术];

学科分类号：

0803 ; 080401 ; 080901 ;

摘要：

为了精确测量激光外差干涉非线性误差,提出了一种新的激光外差干涉非线性误差测量方法。通过对来自激光外差干涉测量臂的输出信号直接进行数据采集和频谱分析,分离出非线性误差的一次谐波和二次谐波分量,得到非线性误差相对测量信号之间的幅度比值;通过建立激光外差干涉非线性误差与幅度比值之间的模型,实现对激光外差干涉非线性误差的精确测量。实验结果表明,应用非线性幅度模型和频谱分析的方法能够精确地测量激光外差干涉非线性误差,相对其它测量方法具有结构简单、易于实现、避免传感器引入非线性误差等优点。

引用

页码：817 / 820

页数：4

共 11 条

[1]

Reduction of systematic errors in heterodyne interferometric displacement measurement. Patterson S,Beckwith J. Proceedings of the 8th IPES Conference . 1995

[2]

A frequency domain method for themeasurement of nonlinearity in heterodyne interferometry. Badami V G,Patterson S R. Precision Engineering . 2000

[3]

A simple method for the compensation of the nonlinearity in the heterodyne interferometer. Eom Tae Bong,Choi Tae Young,Lee KeonHee. Measurement Science and Technology . 2002

[4]

Modeling and verif-ying nonlinearities in heterodyne displacement interferometry. Cosijns S J A G,Haitjema H,Schellekens P H J. Precision Engineering . 2002

[5]

Nonlinearity in measurements of length by optical interferometry. Wu C,Su C. Measurement Science and Technology . 1996

[6]

Importance of rotational beam alignment in the generation of second harmonic errors in laser heterodyne interferometry. De Freitas JM,Player MA. Measurement Science and Technology . 1993

[7]

Investigation and compensation of the nonlinearity of heterodyne interferometers. Hou W,Wilkening G. Precision Engineering . 1992

[8]

Nonlinearity in length measurement using heterodyne laser Michelson interferometry. Sutton CM. Phys E : Sci Instrum . 1987

[9]

Nonlinearity in interferometric measurements. Quenelle R. Hewlett Packard Journal . 1983

[10]

Nonlinearityanalysisofhetero dynelaserinterferometersbyusingpiezo capacitive transducer. PicottoGB,SacconiA. ConferenceProceedings Quan tumElectronicsandPlasmaPhysics . 1991

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