类金刚石薄膜的喇曼光谱高斯分解研究

被引:3
作者
朱纪军
陆祖宏
仲昕
左敦稳
王珉
机构
[1] 东南大学生物医学工程系!江苏南京
[2] 南京航空航天大学机电工程学院!江苏南京
关键词
类金刚石薄膜; 过滤式阴极电弧沉积; 喇曼光谱;
D O I
暂无
中图分类号
O484.5 [薄膜测量与分析];
学科分类号
摘要
采用过滤式阴极电弧沉积的方法获得类金刚石薄膜 .喇曼光谱的分析表明 ,这种薄膜是典型的无氢类金刚石薄膜 .喇曼光谱的高斯分解研究表明 :随着偏压的增加 ,D线和 G线的位置 μd、μg 向低频移动 ,半高宽 Fg 减小、Fd 增加 ,在偏压为 10 0 V时 ,D线和 G线强度比 Id/ Ig 有最大值 .
引用
收藏
页码:47 / 50
页数:4
相关论文
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