共 10 条
[1]
Comparative study of novel micromachined accelerometers employing MIDOS. Bochobza- Degani O,Seter D J,Socher E,et al. Sensors and Actuators . 2000
[2]
A study of silicon angular rate sensors using anisotropic etching technology. Maenaka K,Shiozawa T. Sensors and Actuators . 1994
[3]
Silicon resonant angular rate sensor using electromagnetic excitation and capactive detection. Hashimoto M,Cabuz C,Minami. K,et al. Journal of Micromechanics and Microengineering . 1995
[4]
Commercial vision of silicon-based inertial sensors. Song Cimoo,Shinn Meenam. Sensors and Actuators . 1998
[5]
A miniature high-sensitivity broad-band accelerometer based on electron tunneling transducers. Rocksatd H K. Sensors and Actuators . 1994
[6]
Precision accelerometers with 1 resolution. Rudolf F,Jornod A,Berqovist J,et al. Sensors and Actuators . 1990
[7]
Micromachined gyroscopes. Soderkvist J. Sensors and Actuators . 1994
[8]
MicromachinedInertial Sensors. Navid Yazdi,Farrokh Ayazi,Khalil Najafi. Proceedings of Tricomm . 1998
[9]
Microrobots and micromechanical systems. Trimmer W S N. Sensors and Actuators . 1989
[10]
Micro- Electro- Mechanical System (MEMS) and fluid flows. Ho Chih- ming,Tai Yu- chong. Annual Review of Fluid Mechanics . 1998