Sputtering of Al-Cr and Al-Ti composite targets in pure Ar and in reactive Ar-N 2 plasmas.[J].F. Sanchette;T. Czerwiec;A. Billard;C. Frantz.Surface & Coatings Technology.1997, 2
Sputtering of Al-Cr and Al-Ti composite targets in pure Ar and in reactive Ar-N 2 plasmas.[J].F. Sanchette;T. Czerwiec;A. Billard;C. Frantz.Surface & Coatings Technology.1997, 2