共 1 条
Study on compound ultra-precision alignment technique
被引:5
作者:
Yoshiyuki Uchida
机构:
[1] DepartmentofInformationNetworkEngineering,AichiInstituteofTechnology,Toyoda-,JapanCollegeofElectricalandAutomaticEngineering,NanjingNormalUniv,Nanjing,China
来源:
关键词:
Moirésignal;
differential Moirétechnique;
modified Moirétechnique;
compound alignment;
D O I:
10.19650/j.cnki.cjsi.2007.10.003
中图分类号:
TN47 [大规模集成电路、超大规模集成电路];
学科分类号:
080903 ;
1401 ;
摘要:
<正>A nano-displacement measurement system with duo-gratings is analyzed by using optics theory,a math- ematic model for the system is established,and the characteristic of laser Moirésignals is studied through CAD simu- lation.To improve signal sensitivity and positioning accuracy,two methods of precision positioning are brought for- ward:differential Moirépositioning method and modified Moirépositioning method.A compound control system for precision positioning is set up by combining these 2 Moiréalignment methods,in which the modified Moiréalignment technique is used for coarse alignment and the differential Moiréalignment technique is used for fine alignment,and the system obtains positioning accuracy of±10 nm in±500μm positioning range with shot response time.
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页码:1741 / 1745
页数:5
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