利用曲面计算全息图进行凸面非球面检测

被引：4

作者：

卢振武

李凤有

刘华

谢永军

翁志成

机构：

[1] 中科院长春光学精密机械与物理研究所应用光学国家重点实验室

来源：

光电子·激光 | 2004年 / 09期

关键词：

曲面计算全息图; 凸面非球面; 非球面检测; 激光直写;

D O I：

10.16136/j.joel.2004.09.016

中图分类号：

TP274.4 [];

学科分类号：

摘要：

基于曲面计算全息方法,设计了检测大口径凸面非球面的干涉仪,其精度可优于λ/30(P V值)。研究了利用激光直写设备在曲面基底上制作全息图的方法,由于全息图的线宽变化较大,采用刻线的两边精确写入、中间螺旋线写入快速填充的策略,有效提高了写入精度和效率。在口径110mm、曲率半径500mm的曲面基底上,制作出了全息元件。利用自制的干涉装置,对用金刚石车床车削成的、口径100mm的凸面非球面进行了检测,非球面的精度为0.8λ(P V值),检测结果与车床的精度吻合很好。

引用

页码：1088 / 1090

页数：3

共 8 条

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