抗振型移相干涉测量术的进展

被引:5
作者
吴栋
朱日宏
陈磊
王青
何勇
高志山
机构
[1] 南京理工大学电光学院
关键词
移相干涉仪; 振动; 抗振技术;
D O I
暂无
中图分类号
TH744.3 [];
学科分类号
摘要
移相干涉术易受环境振动的干扰,影响高精度的测量目的。为了进行振动环境下在线光干涉测试,必须采用有效的抗振技术。从移相算法、干涉图采集、光学结构、振动探测与补偿等方面介绍了移相干涉仪抗振技术的研究进展。目前具有抗振功能的移相干涉测试技术日益受到重视。
引用
收藏
页码:59 / 64
页数:6
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