钽酸锂薄膜材料及其热释电红外传感器应用研究进展

被引:3
作者
张德银 [1 ]
黄大贵 [1 ]
李金华 [2 ]
董政 [1 ]
陈敏 [1 ]
机构
[1] 电子科技大学机电工程学院
[2] 江苏工业学院功能材料实验室
关键词
钽酸锂薄膜; 制备技术; 热释电红外传感器; 应用;
D O I
暂无
中图分类号
TB383.2 []; TP212 [发送器(变换器)、传感器];
学科分类号
070205 ; 080501 ; 1406 ; 080202 ;
摘要
介绍了钽酸锂薄膜材料及其热释电红外传感器应用研究概况;简要阐述了热释电红外传感器的工作原理;着重分析了钽酸锂薄膜材料的新制备技术,以及在热释电红外传感器应用方面的研究现状;指出了钽酸锂薄膜材料及其热释电红外传感器应用研究发展前景。
引用
收藏
页码:10 / 12+20 +20
页数:4
相关论文
共 23 条
[1]  
Epitaxial Li TaO3thin fil m by pulsed meta-lorganic chemical vapor deposition from a single precursor. Xie H,Raj R. Applied Physics Letters . 1993
[2]  
I mproved solid phase epitaxial growth of lithium tantalate thin fil ms on sapphire,using a two-step metalorganic chemical-vapor deposition process. Wernberg A A,Braunstein G H,Gysling H J. Applied Physics Letters . 1993
[3]  
Sol-gel derived Li TaO3. Jean J H. Journal of Materials Science . 1990
[4]  
A X-ray diffraction study of epitaxial lithiumtantalite fil ms deposited on(0001)sapphire wafers using r f.diode sputtering. Blanton T N,Chatterjee D K. Thin Solid Fil ms . 1995
[5]  
Preparation of PCLT/P(VDF-TrFE)pyroelectric sensor based on plastic fil m sub-strate. Li J H,,Yuan N Y,Chan H L W. Sensors and Actuators . 2002
[6]  
COMS integrated infrared sensor Transducers97’. Chang D T,Chen D M,Lin F H,et al. . 1997
[7]  
Ion beametching of lithi-umtantalate and its application for pyroelectric linear ar-rays. Sokoll T,,Norkus V,Gerlach G. Surface and Coatings Technology . 1997
[8]  
Action of radiation on pyroelectric crystals. Ta Y. Compt Rend Acad Sci . 1938
[9]  
Characterization of lithiumtantalite thin fil ms sputter-deposited onto RuO2/Si substrates. Kohli C H,Moser J,Prasad K,et al. Microelectronics Journal . 1995
[10]  
A fast-response pyroelectric thermal detector. Cooper J. Journal of Scientific Instruments . 1962