一种柔性三维力触觉传感器阵列的实现方法

被引:4
作者
张正勇
孔德义
梅涛
单建华
倪林
孙磊
吕晓庆
孟庆虎
机构
[1] 中国科学院合肥智能机械研究所
关键词
MEMS技术; 柔性三维力触觉传感器阵列; 倒装焊技术; 多路信号选通;
D O I
暂无
中图分类号
TP212 [发送器(变换器)、传感器]; TP242 [机器人];
学科分类号
080202 ; 1111 ;
摘要
介绍了一种可安装在曲面上,对三维力进行检测的柔性三维力触觉传感器阵列的实现方法.首先采用MEMS技术制备三维力触觉传感器阵列,再将多个三维力触觉传感器单元分别通过倒装焊技术集成在已加工好的柔性电路板基底上,实现了传感器与信号处理电路的互连和传感器阵列(4×4)的柔性化.采用信号选通的多路信号采集方法简化了传感器阵列的信号处理电路.测试结果表明,柔性触觉传感器阵列可弯曲变形90°以上,检测三维力的分辨率达到0.1 N.
引用
收藏
页码:2382 / 2385
页数:4
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