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MEMS technology for optical networking applications. Armand Neukermans,Rajiv Ramaswami. IEEE Communications Magazine, January . 2001
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Batch mode micro-electrodischarge matching. Takahata K,Gianchandani Y B. Journal of Microelectromechanical Systems . 2002
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A micromechanical variable optical attenuator based on EDM micromachining. Cao Zhonghui,Yuan Ye,Bao Junfeng et al. Proceedings of SPIE the International Society for Optical Engineering . 2002
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A silicon MEMS optical switch attenuator and its use in lightwave subsystems. Giles C R,Aksyuk V,Barber B et al. IEEE J. Selected Topics in Quant . Electron . 1999