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A novel hybrid surface micromachined segmented mirror for large aperture laser applications
被引：1
作者：
李捷
陈海清
余洪斌
机构：
[1] Department of Opto-Electronics Engineering Huazhong University of Science and Technology
[2] Department of Opto-Electronics Engineering Huazhong University of Science and Technology Wuhan 430074
基金：
中国国家自然科学基金;
关键词：
mode;
A novel hybrid surface micromachined segmented mirror for large aperture laser applications;
D O I：
暂无
中图分类号：
TN249 [激光的应用];
学科分类号：
0803 ;
080401 ;
080901 ;
摘要：
A novel hybrid surface micromachined segmented mirror array is described. This device is capable of scaling to large apertures for correcting time-varying aberrations in laser applications. Each mirror is composed of bottom electrode, support pan, and mirror plate, in which a T-shaped beam structure is used to support the mirror plate. It can provide mirror with vertical movement and rotation around two horizontal axes. The test results show that the maximum deflection along the vertical direction of the mirror plate is 2μm, while the rotation angles around x and y axes are±2.3°and±1.45°, respectively.
引用
收藏
页码：422 / 424
页数：3
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