共 9 条
[1]
Integrated movable micro-mechanical structures for sensor and actuators. Fan L S,Tai Y C,Muller R S. IEEE Transactions on Electron Devices . 1988
[2]
The future of sensor and actuator systems. Wen H K. Sensors and Actuators . 1996
[3]
Reflexions on the future of microsystem. Lang Walter. Sensors and Actuators . 1999
[4]
Future of microelectromechanical systems (MEMS). Bao M H. Sensors and Actuators . 1996
[5]
Micro and nanothechnologies: a challenge on the way forward to new markets. Benoit J. Journal of Materials Science . 1998
[6]
Application of MEMS technology in automotive sensors and actuators. David S E,Douglas R S. Proceeding of The IEEE . 1988
[7]
The fluid mechanics of microdevices-the Freeman Scholar lecture. Gad-el-Hak M. Journal of Fluid Mechanics . 1999
[8]
Impact of MEMS technology on society. Janusz Bryzek. Sensors and Actuators . 1996
[9]
Review: MEMS and its applications for flow control. Ho Chih-Ming,Tai Yu-Chong. Journal of Fluid Mechanics . 1996