共 3 条
[1]
Robust design of gas and liquid micropumps. M. Richter,R. Linnemann,P. Woias. Sensors and Actuators . 1998
[2]
R. Zengerle,et al,A bidirectional silicon micropump. Sensors and Actuators . 1995
[3]
MEMS: Microelectromechanical Systems. Leo O’Connor. Mechanical Engineering . 1992