氧化锌薄膜光电功能材料研究的关键问题

被引:20
作者
傅竹西
林碧霞
机构
[1] 中国科学院结构分析重点实验室
[2] 中国科学技术大学物理系 中国科学技术大学物理系 安徽 合肥
[3] 安徽 合肥
基金
国家自然科学基金重大研究计划;
关键词
ZnO薄膜; 异质外延; p型掺杂;
D O I
暂无
中图分类号
O484 [薄膜物理学];
学科分类号
080501 ; 1406 ;
摘要
氧化锌薄膜光电功能材料是近年来新发展起来的研究课题,由于它在短波长光电信息功能材料方面具有潜在的应用前景而备受关注。为了开发ZnO结型光电器件,目前首先需要解决高质量ZnO单晶薄膜的外延及p型掺杂等关键问题。综合国内外的研究结果,结合我们的工作,叙述了利用多晶格匹配原理通过过渡层在Si衬底上异质外延高质量ZnO薄膜,介绍了用SiC作过渡层生长ZnO薄膜的有关问题。对ZnO的p型掺杂,分析了制备p型ZnO的困难和利用Ⅲ-Ⅴ族共掺杂方法生长p型ZnO的作用和优点。
引用
收藏
页码:117 / 122
页数:6
相关论文
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