[1] Institute of Microsystems Department of Opto-Electronics Engineering
[2] Huazhong University of Science and Technology
[3] Wuhan Department of Applied Physics
[4] He'nan Polytechnic University
[5] Jiaozuo
[6] Digital Engineering Research Center Huazhong University of Science and Technology
[7] Wuhan
[8] Institute of MicrosystemsHuazhong University of Science and Technology
[9] Department of Applied Physics He'nan Polytechnic University
[10] Wuhan Department of Mechanical Engineering
[11] Wayne State University
[12] Detroit
[13] Michigan
[14] USA