Novel Method for Making MicroopticsElements with Continuous Relief

被引：4

作者：

CHEN Bo

GUO Lurong

TANG Jiyue

GUO YongkangInformation Optics Research CenterSichuan UniversityChengdu ChinaZHOU MingbaoThe State Key Lab of optical technologies on microfabricationInstitute of Optics Electronics Chinese Academy of Scien ^{[610064
]}

机构：

来源：

Chinese Journal of Lasers | 1997年 / 01期

关键词：

moving-mask; microoptics elements; continuous relief;

D O I：

暂无

中图分类号：

O438 [信息光学];

学科分类号：

070207 ; 0803 ;

摘要：

We intreduce the moving-mask method for fabrication of microoptics elements(MOE) with continuous relief in this paper. With only one mask engaged, we obtained a continuous relief with line-symmety or rotation-symmetry several kinds of MOE have been made by using this method such as blazcd grating, parabolic grating, cylindrical lens, et al., experimental results are given.

引用

页码：57 / 63

页数：7

共 4 条

[1]

Gale, Markuls Rossi, Helmut Schutz et al.Continuous relief diffractive optical elements for two dimentional array generation. Michael T. Applied Optics . 1993

[2]

Diffraction efficiency of reflection gratings with a parabolic section profile. P. Langlois,R. Beaulieu. Optics Letters . 1991

[3]

The large format relief-phase HOEs on DCG. Z. N. Kalyashova,A. G. Michailova,N. L. Travnikova. Proceedings of SPIE the International Society for Optical Engineering . 1993

[4]

Silver-halide gelatin holograms. B. J. Chang,K. Winick. Proceedings of SPIE the International Society for Optical Engineering . 1980

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