Three-dimensional imaging in double aberration-corrected scanning confocal electron microscopy, Part I: Elastic scattering

被引：50

作者：

Cosgriff, E. C. ^{[1
]}

D'Alfonso, A. J. ^{[2
]}

Allen, L. J. ^{[2
]}

Findlay, S. D. ^{[2
,3
]}

Kirkland, A. I. ^{[1
]}

Nellist, P. D. ^{[1
]}

机构：

[1] Univ Oxford, Dept Mat, Oxford OX1 3PH, England

[2] Univ Melbourne, Sch Phys, Melbourne, Vic 3010, Australia

[3] Univ Tokyo, Inst Engn Innovat, Bunkyo Ku, Tokyo 1138656, Japan

来源：

ULTRAMICROSCOPY | 2008年 / 108卷 / 12期

基金：

英国工程与自然科学研究理事会; 澳大利亚研究理事会;

关键词：

Scanning transmission electron microscopy; Depth sectioning; Aberration-correction;

D O I：

10.1016/j.ultramic.2008.05.009

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

A transmission electron microscope fitted with both pre-specimen and post-specimen spherical aberration correctors enables the possibility of aberration-corrected scanning confocal electron microscopy. Imaging modes available in this configuration can make use of either elastically or inelastically scattered electrons. In this paper we consider image contrast for elastically scattered electrons. It is shown that there is no linear phase contrast in the confocal condition, leading to very low contrast for a single atom. Multislice simulations of a thicker crystalline sample show that sample vertical location and thickness can be accurately determined. However, buried impurity layers do not give strong, nor readily interpretable contrast. The accompanying paper examines the detection of inelastically scattered electrons in the confocal geometry. (C) 2008 Elsevier B.V. All rights reserved.

引用

页码：1558 / 1566

页数：9

共 21 条

[1] Lattice-resolution contrast from a focused coherent electron probe. Part I [J].