Plasma sheath electric field strengths above a grooved electrode in a parallel-plate radio-frequency discharge

被引：26

作者：

Czarnetzki, U ^{[1
]}

Hebner, GA

Luggenhölscher, D

Döbele, HF

Riley, ME

机构：

[1] Univ Essen Gesamthsch, Inst Laser & Plasmaphys, D-45117 Essen, Germany

[2] Sandia Natl Labs, Albuquerque, NM 87185 USA

来源：

IEEE TRANSACTIONS ON PLASMA SCIENCE | 1999年 / 27卷 / 01期

基金：

美国能源部;

关键词：

electric fields; plasma; Rydberg; sheath;

D O I：

10.1109/27.763042

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

The magnitude of the sheath electric field above a grooved electrode was measured using a novel, two color, laser induced fluorescence technique. Spatially resolved electric fields in the sheath region were determined by mapping the field induced Stark splitting of the n = 14 level in atomic hydrogen. Measured electric field values are in good agreement with calculated values.

引用

页码：70 / 71

页数：2