Geometric error calibration of multi-axis machines using an auto-alignment laser interferometer

被引:67
作者
Chen, JS [1 ]
Kou, TW [1 ]
Chiou, SH [1 ]
机构
[1] Natl Chung Cheng Univ, Dept Mech Engn, Chiayi 621, Taiwan
来源
PRECISION ENGINEERING-JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING | 1999年 / 23卷 / 04期
关键词
geometric error calibration; multi-axis machine tool; auto-alignment laser interferometer;
D O I
10.1016/S0141-6359(99)00016-1
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
This work will report the development and application of an auto-alignment laser interferometer system for the geometric error calibration of CNC multi-axis machines. The system is capable of a diagonal displacement measurement, where multiple machine axes are moved simultaneously, with automatic optic alignment. This capability provides a solution for quick evaluation of the overall volumetric error of a multi-axis machine tool. One application of the system is that the 21 geometric errors of a 3-axis machine can be quickly estimated from the displacement measurements of some determined diagonal lines in the working volume. Compared with a time of several days using a conventional laser interferometer system, it takes only 1 hour for the proposed system to complete the geometry calibration of a 3-axis machine. A method for the roll calibration of a vertical axis is also proposed and demonstrated in this work. (C) 1999 Elsevier Science Inc. All rights reserved.
引用
收藏
页码:243 / 252
页数:10
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