To improve the electrochemical properties of the silicon film anode in lithium cells, we prepared three types of silicon based-films, i.e., intrinsic silicon, n-type silicon, and Ag10Si90 binary films using r.f. magnetron sputtering. Based on galvanostatic charge-discharge tests and a.c. impedance measurements, the n-type silicon film and Ag10Si90 binary film cells exhibited a superior cycle life and lower electrochemical resistance compared with the intrinsic silicon film cell. The potential variation in the electrochemical alloying/de-alloying reactions of the Ag10Si90 binary film with lithium was different from that of the intrinsic silicon film, meaning that the Ag ingredient in the binary film affected the charge-discharge reaction. Furthermore, when a Ni plate roughened by chemical etching was used as a substrate, the Ag10Si90 film anode demonstrated an excellent capacity retention during 400 cycles with a high discharge capacity of >200 mu A h cm(-2) (corresponding to 1500 mA h g(-1)) at 0.5 mA cm(-2) (2.5 C).