Microlens arrays for confocal microscopy

被引：14

作者：

Tiziani, HJ ^{[1
]}

Achi, R ^{[1
]}

Kramer, RN ^{[1
]}

Hessler, T ^{[1
]}

Gale, MT ^{[1
]}

Rossi, M ^{[1
]}

Kunz, RE ^{[1
]}

机构：

[1] PAUL SCHERRER INST,CH-8048 ZURICH,SWITZERLAND

来源：

OPTICS AND LASER TECHNOLOGY | 1997年 / 29卷 / 02期

关键词：

micro-optics; microlens arrays; confocal microscopy;

D O I：

10.1016/S0030-3992(96)00054-0

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A new, high resolution measuring system based on confocal microscopy has been developed for the evaluation of microlens arrays, in particular for applications in confocal microscopy itself. Lenslet arrays for parallel scanning and processing in confocal microscopy were designed as phase-matched Fresnel lenslets and fabricated by direct laser writing. Replica arrays were produced by ultraviolet embossing and hot embossing techniques. Fabricated arrays with a numerical aperture of 0.28 exhibited near diffraction limited performance and a focal length standard deviation of 120 nm in a nominal value of 250 mu m The technique developed represents a convenient and powerful technique for the characterization of lenslet arrays in general. (C) 1997 Elsevier Science Ltd.

引用

页码：85 / 91

页数：7

共 19 条

[1] CONFOCAL SCANNING LIGHT-MICROSCOPY WITH HIGH APERTURE IMMERSION LENSES [J].

BRAKENHOFF, GJ ;

BLOM, P ;

BARENDS, P .

JOURNAL OF MICROSCOPY-OXFORD, 1979, 117 (NOV) :219-232

[2]

CARSON K, 1987, APPL OPTICS, V26, P3232

[3]

DALEY D, 1990, J MEAS SCI TECHNOL, V1, P759

[4] FABRICATION OF CONTINUOUS-RELIEF MICRO-OPTICAL ELEMENTS BY DIRECT LASER WRITING IN PHOTORESISTS [J].

GALE, MT ;

ROSSI, M ;

PEDERSEN, J ;

SCHUTZ, H .

OPTICAL ENGINEERING, 1994, 33 (11) :3556-3566

[5]

GALE MT, 1983, P SOC PHOTO-OPT INST, V398, P347, DOI 10.1117/12.935397

[6] MICROLENSES FABRICATED BY MELTING A PHOTORESIST ON A BASE LAYER [J].

HASELBECK, S ;

SCHREIBER, H ;

SCHWIDER, J ;

STREIBL, N .

OPTICAL ENGINEERING, 1993, 32 (06) :1322-1324

[7]

HESSLER T, 1995, EOS TOP M DIG SER, V5, P37

[8]

*IOP, 1991, IOP SHORT M MICR ARR

[9]

Kley E.-B., 1993, International Journal of Optoelectronics, V8, P513

[10] PHASE-MATCHED FRESNEL ELEMENTS [J].

KUNZ, RE ;

ROSSI, M .

OPTICS COMMUNICATIONS, 1993, 97 (1-2) :6-10

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