Design of omega mode imaging energy filters

被引:7
作者
Tsuno, K [1 ]
Kaneyama, T [1 ]
Honda, T [1 ]
Ishida, Y [1 ]
机构
[1] Jeol Ltd, Tokyo 1968558, Japan
关键词
omega filter; imaging energy filter; simulation of electron optics; energy resolution;
D O I
10.1016/S0168-9002(98)01571-X
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
Optical properties of two types of omega filter, A-type and B-type, are compared. The A-type has three focuses in the magnetic field direction (y), while the B-type has two. The latter gives a smaller total tilting angle at the entrance and the exit edges and a shorter drift length between the deflection magnets. The effect of the length L-L between the window and the pupil planes on the non-isochromaticity is examined under two conditions of a fixed post-filter lens magnification M-PL = 100 and the optimum magnification M-PL(opt). Longer L-L is better for isochromatic imaging under the fixed magnification condition M-PL = 100 times. However, the selection of L-L is not so important when the optimum M-PL(opt) is used. Three-dimensional field distribution and ray trajectory calculations are made to show the effects of misalignment of the optical axis and mistake of the tilting angle at the entrance and exit edges of the deflection magnets. (C) 1999 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:187 / 196
页数:10
相关论文
共 11 条
  • [1] [Anonymous], ENERGY FILTERING TRA
  • [2] A COMPACT ABERRATION-FREE IMAGING FILTER WITH INSIDE ENERGY SELECTION
    DEGENHARDT, R
    ROSE, H
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1990, 298 (1-3) : 171 - 178
  • [3] LANIO S, 1986, OPTIK, V73, P99
  • [4] 1ST-ORDER STUDY OF A DISPERSIVE, MAGNETIC, SYMMETRICAL ALPHA-TYPE SYSTEM
    PEREZ, JP
    SIRVEN, J
    SEGUELA, A
    LACAZE, JC
    [J]. JOURNAL DE PHYSIQUE, 1984, 45 (NC-2): : 171 - 174
  • [5] ROSE H, 1974, OPTIK, V3, P336
  • [6] Computer analysis of imaging energy filters
    Rouse, J
    Munro, E
    Tsuno, K
    [J]. CHARGED PARTICLE OPTICS III, 1997, 3155 : 193 - 204
  • [7] Senoussi S., 1971, THESIS U PARIS ORSAY
  • [8] Design and testing of Omega mode imaging energy filters at 200 kV
    Tsuno, K
    Kaneyama, T
    Honda, T
    Tsuda, K
    Terauchi, M
    Tanaka, M
    [J]. JOURNAL OF ELECTRON MICROSCOPY, 1997, 46 (05): : 357 - 368
  • [9] Acceptance of imaging energy filters
    Uhlemann, S
    Rose, H
    [J]. ULTRAMICROSCOPY, 1996, 63 (3-4) : 161 - 167
  • [10] UHLEMANN S, 1994, OPTIK, V96, P163